最小流量：0.1SCCM 最大流量：5000SLPM
M100-TL/TH低(高)溫氣體層流質量流量計在低到零下50℃，高到110℃的極端寬泛的溫度區(qū)間范圍內均能保持高精度、高重復性、快速響應的產品性能，避免了極端環(huán)境波動對產品測量過程產生的影響，是進行低（高）溫環(huán)境條件下流量測量的理想質量流量計。
PIPG-M101-TL/TH-00-0500 | 0.5 SCCM
PIPG-M101-TL/TH-01-0001 | 1 SCCM
PIPG-M101-TL/TH-01-0002 | 2 SCCM
PIPG-M101-TL/TH-01-0005 | 5 SCCM
PIPG-M101-TL/TH-01-0010 | 10 SCCM
PIPG-M101-TL/TH-01-0020 | 20 SCCM
PIPG-M102-TL/TH-01-0050 | 50 SCCM
PIPG-M102-TL/TH-01-0100 | 100 SCCM
PIPG-M102-TL/TH-01-0200 | 200 SCCM
PIPG-M102-TL/TH-01-0500 | 500 SCCM
PIPG-M102-TL/TH-01-1000 | 1000 SCCM
PIPG-M102-TL/TH-01-2000 | 2000 SCCM
PIPG-M120-TL/TH-02-0005 | 5 SLPM
PIPG-M120-TL/TH-02-0010 | 10 SLPM
PIPG-M120-TL/TH-02-0020 | 20 SLPM
PIPG-M120-TL/TH-02-0050 | 50 SLPM
PIPG-M120-TL/TH-02-0100 | 100 SLPM
PIPG-M120-TL/TH-02-0200 | 200 SLPM
PIPG-M150-TL/TH-02-0500 | 500 SLPM
PIPG-M150-TL/TH-02-1000 | 1000 SLPM
PIPG-M150-TL/TH-02-1500 | 1500 SLPM
PIPG-M150-TL/TH-02-2000 | 2000 SLPM
PIPG-M150-TL/TH-02-3000 | 3000 SLPM
PIPG-M150-TL/TH-02-4000 | 4000 SLPM
PIPG-M150-TL/TH-02-5000 | 5000 SLPM
PIPG-M101-TL/TH-00-0500 | 0.5 SCCM
PIPG-M101-TL/TH-01-0001 | 1 SCCM
PIPG-M101-TL/TH-01-0002 | 2 SCCM
PIPG-M101-TL/TH-01-0005 | 5 SCCM
PIPG-M101-TL/TH-01-0010 | 10 SCCM
PIPG-M101-TL/TH-01-0020 | 20 SCCM
