最小流量：0.1SCCM 最大流量：5000SLPM
M100-WR寬量程氣體層流質(zhì)量流量計(jì)在M100標(biāo)準(zhǔn)型氣體層流質(zhì)量流量計(jì)的基礎(chǔ)上提高2倍的可精確測(cè)量范圍，實(shí)現(xiàn)在10%~100%的量程范圍內(nèi)達(dá)到1%讀數(shù)精度，并通過產(chǎn)品內(nèi)置的壓力、溫度傳感器的精確補(bǔ)償及獨(dú)創(chuàng)核心算法，在低零點(diǎn)、溫度、壓力漂移量上表現(xiàn)出了杰出性能。同時(shí)，內(nèi)置多種氣體和混氣設(shè)置，有效簡(jiǎn)化了系統(tǒng)的復(fù)雜度，減少客戶采購成本，提高系統(tǒng)的穩(wěn)定度。
PIPG-M101-WR-00-0500 | 0.5 SCCM
PIPG-M101-WR-01-0001 | 1 SCCM
PIPG-M101-WR-01-0002 | 2 SCCM
PIPG-M101-WR-01-0005 | 5 SCCM
PIPG-M101-WR-01-0010 | 10 SCCM
PIPG-M101-WR-01-0020 | 20 SCCM
PIPG-M102-WR-01-0050 | 50 SCCM
PIPG-M102-WR-01-0100 | 100 SCCM
PIPG-M102-WR-01-0200 | 200 SCCM
PIPG-M102-WR-01-0500 | 500 SCCM
PIPG-M102-WR-01-1000 | 1000 SCCM
PIPG-M102-WR-01-2000 | 2000 SCCM
PIPG-M120-WR-02-0005 | 5 SLPM
PIPG-M120-WR-02-0010 | 10 SLPM
PIPG-M120-WR-02-0020 | 20 SLPM
PIPG-M120-WR-02-0050 | 50 SLPM
PIPG-M120-WR-02-0100 | 100 SLPM
PIPG-M120-WR-02-0200 | 200 SLPM
PIPG-M150-WR-02-0500 | 500 SLPM
PIPG-M150-WR-02-1000 | 1000 SLPM
PIPG-M150-WR-02-1500 | 1500 SLPM
PIPG-M150-WR-02-2000 | 2000 SLPM
PIPG-M150-WR-02-3000 | 3000 SLPM
PIPG-M150-WR-02-4000 | 4000 SLPM
PIPG-M150-WR-02-5000 | 5000 SLPM
PIPG-M101-WR-00-0500 | 0.5 SCCM
PIPG-M101-WR-01-0001 | 1 SCCM
PIPG-M101-WR-01-0002 | 2 SCCM
PIPG-M101-WR-01-0005 | 5 SCCM
PIPG-M101-WR-01-0010 | 10 SCCM
PIPG-M101-WR-01-0020 | 20 SCCM
