最小流量：0.1SCCM 最大流量：5000SLPM
M100-WR寬量程氣體層流質量流量計在M100標準型氣體層流質量流量計的基礎上提高2倍的可精確測量范圍，實現在10%~100%的量程范圍內達到1%讀數精度，并通過產品內置的壓力、溫度傳感器的精確補償及獨創核心算法，在低零點、溫度、壓力漂移量上表現出了杰出性能。同時，內置多種氣體和混氣設置，有效簡化了系統的復雜度，減少客戶采購成本，提高系統的穩定度。
PIPG-M101-WR-00-0500 | 0.5 SCCM
PIPG-M101-WR-01-0001 | 1 SCCM
PIPG-M101-WR-01-0002 | 2 SCCM
PIPG-M101-WR-01-0005 | 5 SCCM
PIPG-M101-WR-01-0010 | 10 SCCM
PIPG-M101-WR-01-0020 | 20 SCCM
PIPG-M102-WR-01-0050 | 50 SCCM
PIPG-M102-WR-01-0100 | 100 SCCM
PIPG-M102-WR-01-0200 | 200 SCCM
PIPG-M102-WR-01-0500 | 500 SCCM
PIPG-M102-WR-01-1000 | 1000 SCCM
PIPG-M102-WR-01-2000 | 2000 SCCM
PIPG-M120-WR-02-0005 | 5 SLPM
PIPG-M120-WR-02-0010 | 10 SLPM
PIPG-M120-WR-02-0020 | 20 SLPM
PIPG-M120-WR-02-0050 | 50 SLPM
PIPG-M120-WR-02-0100 | 100 SLPM
PIPG-M120-WR-02-0200 | 200 SLPM
PIPG-M150-WR-02-0500 | 500 SLPM
PIPG-M150-WR-02-1000 | 1000 SLPM
PIPG-M150-WR-02-1500 | 1500 SLPM
PIPG-M150-WR-02-2000 | 2000 SLPM
PIPG-M150-WR-02-3000 | 3000 SLPM
PIPG-M150-WR-02-4000 | 4000 SLPM
PIPG-M150-WR-02-5000 | 5000 SLPM
PIPG-M101-WR-00-0500 | 0.5 SCCM
PIPG-M101-WR-01-0001 | 1 SCCM
PIPG-M101-WR-01-0002 | 2 SCCM
PIPG-M101-WR-01-0005 | 5 SCCM
PIPG-M101-WR-01-0010 | 10 SCCM
PIPG-M101-WR-01-0020 | 20 SCCM
